A miniaturised sensor for gaseous mercury detection
نویسندگان
چکیده
A new microfabricated physical sensor for elemental gaseous mercury (Hg) determinations has been developed and experimentally tested by the Authors. The sensor is based on the technique of resistivity variation of thin gold film. The gold film surface and the sensor behaviour on different substrates have been investigated. The sensor design has been performed in observation of the minimum detection limit and power requirements. A study on thin film properties, sensor-substrate interaction and the characterization of the sensor in terms of performances and technical features has been performed. The use of Micro System Technologies (MST) have allowed to obtain a miniaturized system with the sensing element, the electrical routes and a temperature sensor integrated onto a small substrate with a SIM card shape.
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